Assignee
- Semiconductor Manufacturing International (Beijing)
- Semiconductor Manufacturing International (Shanghai)
Inventors
- Zhaoxu Shen (7 patents)
- Jianhua Ju (15 patents)
- Shaofeng Yu (53 patents)
- Yang Liu (574 patents)
- Yongmeng Lee (2 patents)
US Patent 10535750 · Granted Jan 14, 2020