Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Substrate processing apparatus, processing apparatus, and method for manufacturing device

Substrate processing apparatus, processing apparatus, and method for manufacturing device

US Patent 10527945 · Granted Jan 7, 2020

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Information processing device, control method, program, and storage medium2025
Ultra-high bandwidth multi-junction silicon optical modulator2025
Negative electrode2025
Liquid ejection device2025
Semiconductor memory device and method for manufacturing semiconductor memory de2025
Multi-doped slab silicon optical modulator2025
All-solid-state battery2025
Germanium-on-silicon avalanche photodetector in silicon photonics platform, meth2025
Reconfigurable optical receiver for use with multiple modulation techniques2025
Optical device, exposure device, method for manufacturing flat panel display, an2025
Semiconductor-based optical modulator2025
Silicon photonics integration circuit2024