Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Gas supply unit and thin film deposition apparatus including the same

Gas supply unit and thin film deposition apparatus including the same

US Patent 10526706 · Granted Jan 7, 2020

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Method for battery management and battery system providing the same2025
Polar functional group-partially introduced polymer, preparation method therefor2023
Optical unit of lamp for vehicle2021
Gas supply unit and substrate processing system2020
Apparatus and method for diagnosing failure of switch element2020
Gas injection apparatus and thin film deposition equipment including the same2020
Gas injection apparatus and thin film deposition equipment including the same2020
Substrate processing apparatus and substrate processing method using the same2020
Display device and backlight unit included therein2019
Organic semiconductor compound, production method thereof, and organic electroni2019
Semiconductor test apparatus2018
Reflective diffusion lens, display apparatus having the same2018