Magnetoelastically actuated MEMS device and methods for its manufacture

Assignee

• National Technology & Engineering Solutions Of Sandia

Inventors

• Eric Langlois (14 patents)
• Christian Lew Arrington (8 patents)
• Patrick Sean Finnegan (8 patents)
• Andrew E. Hollowell (6 patents)
• Jamin Ryan Pillars (6 patents)
• Todd Monson (8 patents)

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