Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Heating apparatus and substrate processing apparatus having the same

Heating apparatus and substrate processing apparatus having the same

US Patent 10508333 · Granted Dec 17, 2019

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Gripper for a door and a control method thereof2025
Vehicular air conditioning system2025
Semiconductor integrated circuit device and semiconductor system including the s2025
Method for synchronizing time in multiple time domains, and apparatus implementi2025
Electrostatic discharge circuit and electrostatic discharge control system2025
Interface system and memory system including the same2025
Vehicle air conditioner2025
Method for controlling vehicle thermal management system2025
Storage device for managing data based on time information and operation method 2025
Error handling device, semiconductor memory device including the same, and error2025
Air conditioner for vehicle2025
Heat pump system for vehicle2024