Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Method for forming TiON film

Method for forming TiON film

US Patent 10483100 · Granted Nov 19, 2019

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Film-forming method and film-forming system2025
Method and apparatus for embedding ruthenium in recess formed on substrate surfa2025
Titanium nitride film forming method and titanium nitride film forming apparatus2025
Ruthenium film forming method and substrate processing system2025
Hard mask, substrate processing method, and substrate processing apparatus2024
Substrate processing method and substrate processing apparatus2024
Method for forming RuSi film and substrate processing system2024
Method of forming tungsten film and system therefor2023
Method for forming ruthenium film and apparatus for forming ruthenium film2023
Ruthenium film forming method and substrate processing system2023
Surface processing method and processing system2022
Embedding method and processing system2021