Droplet generator for lithographic apparatus, EUV source and lithographic apparatus

Assignee

• Asml Netherlands B.V.

Inventors

• Johan Frederik Dijksman (66 patents)
• Bastiaan Lambertus Wilhelmus Marinus Van De Ven (23 patents)
• Koen Gerhardus Winkels (8 patents)
• Theodorus Wilhelmus Driessen (8 patents)
• Georgiy O. Vaschenko (28 patents)
• Peter Michael Baumgart (64 patents)
• Wilhelmus Henricus Theodorus Maria Aangenent (14 patents)
• Jan Okke Nieuwenkamp (3 patents)
• Wim Ronald Kampinga (3 patents)
• Jari Ruotsalainen (1 patents)

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