Method for manufacturing gate stack structure

Assignee

• United Microelectronics

Inventors

• Chun-Ting Chiang (13 patents)
• Chi-Ju Lee (15 patents)
• Chih-Wei Lin (283 patents)
• Bo SU (25 patents)
• Yen-Liang Wu (33 patents)
• Wen-Tsung Chang (27 patents)
• Jui-Ming Yang (19 patents)
• I-Fan Chang (17 patents)

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