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Home › Temperature compensating sensor having a compliant layer separating independent force sensing substrates and sense circuitry to obtain a relative measure between the force sensing substrates

Temperature compensating sensor having a compliant layer separating independent force sensing substrates and sense circuitry to obtain a relative measure between the force sensing substrates

US Patent 10466829 · Granted Nov 5, 2019

Estimated economic value: $118,994,000 ⓘ

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