Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Substrate holding device, lithography apparatus, and article production method

Substrate holding device, lithography apparatus, and article production method

US Patent 10431463 · Granted Oct 1, 2019

Estimated economic value: $23,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Method for disposing substrate and method for manufacturing article2023
Pattern forming apparatus, alignment mark detection method, and pattern forming 2021
Magnesium oxide powder, resin composition including same, and method for produci2019
Holding device, lithography apparatus, and method for manufacturing item2017