Oxide semiconductor film and semiconductor device

Assignee

• Semiconductor Energy Laboratory

Inventors

• Shunpei Yamazaki (6,629 patents)
• Masayuki Sakakura (297 patents)
• Ryosuke Watanabe (43 patents)
• Junichiro Sakata (401 patents)
• Kengo Akimoto (389 patents)
• Akiharu Miyanaga (267 patents)
• Takuya Hirohashi (73 patents)
• Hideyuki Kishida (76 patents)

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