Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Adaptive beam current for high throughput patterning

Adaptive beam current for high throughput patterning

US Patent 10415133 · Granted Sep 17, 2019

Estimated economic value: $4,427,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Particle-induced x-ray emission (PIXE) using hydrogen and multi-species focused 2024
Method for alignment of a light beam to a charged particle beam2020
Collision ionization source2019
Method of modifying a sample surface layer from a microscopic sample2018
Method of depositing material2018
Collision ionization ion source2018
Localized, in-vacuum modification of small structures2017
Integrated light optics and gas delivery in a charged particle lens2016
System for in situ reactivation of fluorescence marker2016
Localized, in-vacuum modification of small structures2016
Microfluidics delivery systems2015
In situ reactivation of fluorescence marker2014