Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Method of predicting performance of a lithographic apparatus, calibration of lithographic apparatus, device manufacturing method

Method of predicting performance of a lithographic apparatus, calibration of lithographic apparatus, device manufacturing method

US Patent 10409168 · Granted Sep 10, 2019

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Lithographic cluster system, method for calibrating a positioning device of a li2016
SIMD parallel processor architecture2015
Configurable logic device2011
Configurable logic device2011
Circuit comprising a matrix of programmable logic cells2010