Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Semiconductor devices having a membrane layer with smooth stress-relieving corrugations and methods of fabrication thereof

Semiconductor devices having a membrane layer with smooth stress-relieving corrugations and methods of fabrication thereof

US Patent 10405118 · Granted Sep 3, 2019

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Method for detecting aerosol particles in ambient air, involves irradiating anal2025
Membrane support for dual backplate transducers2025
Membrane support for dual backplate transducers2025
Thermoresistive micro sensor device2025
MEMS-based photoacoustic cell2024
Dual membrane transducer2024
Dual membrane transducer2024
Modeling the emission intensity of an IR emitter by varying the emission surface2024
Thin MEMS pump with membrane and valve lip structure2023
Thin MEMS pump with membrane and valve lip structure2023
MEMS transducer with improved performance2023
Method for processing a layer structure and microelectromechanical component2023