Home› Piezoelectric pump having a vibrating piece having a vibrating piece having a central zone, a peripheral zone, a first recess, a stopper, at least one position limiting wall, and at least one through groove and operating method thereof
Piezoelectric pump having a vibrating piece having a vibrating piece having a central zone, a peripheral zone, a first recess, a stopper, at least one position limiting wall, and at least one through groove and operating method thereof