Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Methods for fabricating pressure sensors with non-silicon diaphragms

Methods for fabricating pressure sensors with non-silicon diaphragms

US Patent 10378985 · Granted Aug 13, 2019

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Methods for fabricating pressure sensors with non-silicon diaphragms2023
Methods for mounting a MEMS sensor for in-stream measurements2018
Pressure sensor with support structure for non-silicon diaphragm2017
MEMS accelerometer2017
Microelectromechanical pressure sensors2017
High-output MEMS accelerometer2017
Pressure sensors and methods of making the same2016
Low-G MEMS acceleration switch2016
Pressure sensors and methods of making the same2015
Low-G MEMS acceleration switch2014
Weatherized direct-mount absolute pressure sensor2013
Integrated MEMS and ESD protection devices2012