MEMS device, liquid ejecting head, liquid ejecting apparatus, and MEMS device manufacturing method

Assignee

• Seiko Epson

Inventors

• Motoki Takabe (136 patents)
• Eiju Hirai (126 patents)
• Munehide Saimen (26 patents)
• Yasuyuki Matsumoto (45 patents)
• Shuichi Tanaka (70 patents)
• Tsuyoshi Yoda (22 patents)

View full patent text on Google Patents →