Systems and methods for automated multi-zone detection and modeling

Assignee

• Kla-Tencor

Inventors

• Jeremy Nabeth (3 patents)
• Onur N. Demirer (6 patents)
• Ramkumar Karur-Shanmugam (2 patents)
• Choon (George) Hoong Hoo (1 patents)
• Christian Sparka (2 patents)
• Hoyoung Heo (3 patents)
• Stuart Sherwin (2 patents)
• Unknown
• Mark D. Smith (27 patents)
• William Pierson (8 patents)

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