Delivery device, manufacturing system and process of manufacturing

Assignee

• Silcotek
• Aixtron Se

Inventors

• David A. SMITH (17 patents)
• Min YUAN (19 patents)
• James B. Mattzela (14 patents)
• Olaf Martin WURZINGER (1 patents)
• Dietmar Keiper (1 patents)
• Anna Katharina Haab (1 patents)

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