Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Controlling mechanical properties of a MEMS microphone with capacitive and piezoelectric electrodes

Controlling mechanical properties of a MEMS microphone with capacitive and piezoelectric electrodes

US Patent 10277988 · Granted Apr 30, 2019

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

MEMS microphone system2021
MEMS transducer system for pressure and acoustic sensing2021
MEMS microphone system with low pressure gap and back volume2021
System of non-acoustic sensor combined with MEMS microphone2021
MEMS microphone system having an electrode assembly2020
MEMS microphone system with low pressure gap and back volume2019
MEMS microphone system and method2019
Center-fixed MEMS microphone membrane2018
Adaptive acoustic intensity analyzer2018
Frequency modulated microphone system2018
Microphone system with driven electrodes2018
Microphone system with driven electrodes2018