Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Film deposition apparatus and method for cleaning film deposition apparatus

Film deposition apparatus and method for cleaning film deposition apparatus

US Patent 10269538 · Granted Apr 23, 2019

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Testing method and manufacturing method2025
Fabrication method of semiconductor device and test method of semiconductor devi2024
Semiconductor device and semiconductor module2024
Electronic device2024
Semiconductor device and semiconductor module2023
Measuring device, measuring method, and programs therefor2020
Surveying instrument including a reflective prism mounted on a movable part2020
Measuring device, measuring method, and programs therefor2019
Image forming apparatus, method of controlling the same, and storage medium2019
Electromagnetic wave measuring device, electromagnetic wave measuring method, an2018
Illuminance measuring system2018
Image forming apparatus, printing control method of the same, and storage medium2018