Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Lithographic method and apparatus

Lithographic method and apparatus

US Patent 10261423 · Granted Apr 16, 2019

Estimated economic value: $24,492,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Computational metrology2025
Method for filtering an image and associated metrology apparatus2025
Metrology system and method for determining a characteristic of one or more stru2025
Metrology method and apparatus and computer program2025
Metrology apparatus and method for determining a characteristic of one or more s2024
Metrology apparatus and method for determining a characteristic of one or more s2024
Metrology method and associated metrology and lithographic apparatuses2024
Two-dimensional diffraction grating2024
Metrology system and method for determining a characteristic of one or more stru2024
Imaging via zeroth order suppression2024
Metrology apparatus and method for determining a characteristic of one or more s2023
Metrology apparatus and method for determining a characteristic of one or more s2023