Thin film deposition apparatus

Assignee

• Samsung

Inventors

• Hyun-Sook Park (24 patents)
• Chang-Mog Jo (15 patents)
• Hee-Cheol Kang (25 patents)
• Yun-Mi Lee (26 patents)
• Un-Cheol Sung (40 patents)
• Yong-Sup Choi (20 patents)
• Jong-Heon Kim (58 patents)
• Jae-Kwang Ryu (18 patents)

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