Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Imprint lithography alignment method and apparatus

Imprint lithography alignment method and apparatus

US Patent 10222693 · Granted Mar 5, 2019

Estimated economic value: $8,824,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Imprint lithography2024
Imprint lithography2024
Generating annotation data of tissue images2024
Systems and methods for reducing resist model prediction errors2024
Systems and methods for predicting layer deformation2024
Inspection tool and inspection method2023
Solid state light sources enabling spokes when used with a color wheel2023
Imprint lithography2023
Imprint lithography2023
Systems and methods for predicting layer deformation2023
Lithographic patterning process and resists to use therein2022
Method for controlling a manufacturing apparatus and associated apparatuses2021