Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Position detection apparatus, machine tool apparatus, and exposure apparatus

Position detection apparatus, machine tool apparatus, and exposure apparatus

US Patent 10209102 · Granted Feb 19, 2019

Estimated economic value: $21,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Force sensor and robot equipped with force sensor2025
Optical encoder and control apparatus for receiving light that forms moire fring2024
Optical encoder and control apparatus2024
Force sensor and robot equipped with force sensor2023
Optical encoder and drive control device comprising a light receiving element to2022
Position detection apparatus that detects a position of an object by detecting l2021
Optical sensor and apparatus including optical sensor2021
Position detection apparatus, lens apparatus, image pickup system, machine tool 2020
Optical sensor having an irradiating light separation component and image formin2019
Position detection apparatus, force sensor, and apparatus2019
Position detection apparatus, lens apparatus, image pickup system, machine tool 2019
Scale, encoder, lens apparatus, and image pickup system having a plurality of pa2017