Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Method and apparatus for alignment of optical and charged-particle beams in an electron microscope

Method and apparatus for alignment of optical and charged-particle beams in an electron microscope

US Patent 10176963 · Granted Jan 8, 2019

Assignee

No assignee recorded.

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Multiple sensor catheter assembly2025
Advanced packaging for compact object-scanning modules2025
MOS devices for sensing total ionizing dose2024
Coaxial fiber optical pyrometer with laser sample heater2021
Coaxial fiber optical pyrometer with laser sample heater2021
Light-emitting device with total internal reflection (TIR) extractor2018
Light-emitting device with remote scattering element and total internal reflecti2018
Method for stem sample inspection in a charged particle beam instrument2017
Cursor control device2016
Light-emitting device with remote scattering element and total internal reflecti2016
Method for processing samples held by a nanomanipulator2014
Apparatus for precursor delivery system for irradiation beam instruments2013