Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › High Q quartz-based MEMS resonators and method of fabricating same

High Q quartz-based MEMS resonators and method of fabricating same

US Patent 10141906 · Granted Nov 27, 2018

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Systems and methods for temperature compensation2025
Acoustically coupled dual resonators for phononic frequency comb generation2025
Real-time adaptive tuning of gyroscopes via quadrature dithering2025
Double N-hedron sensor cluster2025
Modular inertial measurement unit and elements for making same2025
Modular inertial measurement unit and elements for making same2025
Gyroscope sensors having nodal push-pull actuation and antinodal readout2025
In-situ phase noise compensation for phononic frequency combs2025
Quartz MEMS piezoelectric resonator for chipscale RF antennae2024
Method and system for generating phononic frequency comb2024
Antenna dynamically matched with electromechanical resonators2024
Antenna loaded with electromechanical resonators2024