Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Monitoring method and apparatus for control of excimer laser annealing

Monitoring method and apparatus for control of excimer laser annealing

US Patent 10121687 · Granted Nov 6, 2018

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Method and apparatus for laser annealing2024
Excimer laser with uniform beam2021
Polarization-controlled laser line-projector2019
Monitoring method and apparatus for excimer-laser annealing process2018
Processes and systems for laser crystallization processing of film regions on a 2016
Monitoring method and apparatus for control of excimer laser annealing2016
Excimer laser apparatus projecting a beam with a selectively variable short-axis2015
Processes and systems for laser crystallization processing of film regions on a 2014
Line scan sequential lateral solidification of thin films2013
Single scan irradiation for crystallization of thin films2013
Line scan sequential lateral solidification of thin films2012
Single scan irradiation for crystallization of thin films2011