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Home › Controller for actuating a micromechanical actuator, actuating system for actuating a micromechanical actuator, micro-mirror system and method for actuating a micromechanical actuator

Controller for actuating a micromechanical actuator, actuating system for actuating a micromechanical actuator, micro-mirror system and method for actuating a micromechanical actuator

US Patent 10118818 · Granted Nov 6, 2018

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