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Home › Defect inspection apparatus for inspecting sheet-like inspection object, computer-implemented method for inspecting sheet-like inspection object, and defect inspection system for inspecting sheet-like inspection object

Defect inspection apparatus for inspecting sheet-like inspection object, computer-implemented method for inspecting sheet-like inspection object, and defect inspection system for inspecting sheet-like inspection object

US Patent 10109045 · Granted Oct 23, 2018

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