Material growth with temperature controlled layer

Assignee

• Sensor Electronic Technology

Inventors

• Maxim S. Shatalov (163 patents)
• Mikhail Gaevski (22 patents)
• Igor Agafonov (24 patents)
• Robert M. Kennedy (14 patents)
• Alexander Dobrinsky (262 patents)
• Michael Shur (387 patents)
• Emmanuel Lakios (11 patents)

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