Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › MEMS devices and processes

MEMS devices and processes

US Patent 10085094 · Granted Sep 25, 2018

Estimated economic value: $15,584,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

MEMS microphone2025
Micro-electro-mechanical system and electro-acoustic conversion device having th2025
Micro-electro-mechanical system and electro-acoustic conversion device having th2025
Microelectromechanical system membrane2025
Microelectromechanical system2025
Sealed dual membrane structure and device including the same2025
Microelectromechanical system and process of making it2024
Microelectromechanical system and process of making it2024
Comb-drive device used in micro electro mechanical system2024
Cantilever microphone2024
Electrostatic clutch2024
MEMS device2024