Assignee
- Semiconductor Manufacturing International (Shanghai)
- Semiconductor Manufacturing International (Beijing)
Inventors
- Hai Feng Yang (1 patents)
- Hua Tang (14 patents)
- Fei Liu (270 patents)
- Ben Peng Xun (2 patents)
- Xiao Ming Zhu (13 patents)
US Patent 10079611 · Granted Sep 18, 2018