Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Dielectric cladding of microelectromechanical systems (MEMS) elements for improved reliability

Dielectric cladding of microelectromechanical systems (MEMS) elements for improved reliability

US Patent 10029908 · Granted Jul 24, 2018

Estimated economic value: $22,877,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Stackable molecular spectroscopy cell2025
System and method for array of MEMS elements2025
Barrier structure within a microelectronic enclosure2025
Barrier structure within a microelectronic enclosure2025
System and method for MEMS devices2025
Integrated filter optical package2025
Multi-level microelectromechanical system structure with non-photodefinable orga2025
Erasable writable substrates and methods of manufacture2025
Electrostatic actuator with 4-bit digital electrode2024
Windowed wafer assemblies having interposers2024
Wet anisotropic etching of silicon2024
Erasable writable materials2023