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Home › Controller for controlling a micromechanical actuator, in particular a micromirror, control system, micromirror system, and method for controlling a micromechanical actuator

Controller for controlling a micromechanical actuator, in particular a micromirror, control system, micromirror system, and method for controlling a micromechanical actuator

US Patent 10018971 · Granted Jul 10, 2018

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