Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6262535 | Electrode support tube for high pressure discharge lamp | Dietmar Ehrlichmann | 2001-07-17 |
| 5650630 | Mercury vapor high-pressure discharge lamp and irradiation method, particularly for mask pattern exposure of semiconductor wafers | Juergen Maier | 1997-07-22 |
| 5608227 | Mercury-vapor high-pressure short-arc discharge lamp, and method and apparatus for exposure of semiconductor wafers to radiation emitted from said lamp | Juergen Maier | 1997-03-04 |
| 5304892 | Double-ended high-pressure discharge lamp | Bernd Lewandowski, Dieter Franke, Walter Kiele, Juergen Begemann | 1994-04-19 |