Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8390173 | MEMS switch and method of manufacturing the MEMS switch | Takaaki Yoshihara, Yoshiki Hayasaki, Takeo Shirai, Tomoaki Matsushima, Hiroshi Kawada | 2013-03-05 |
| 8164812 | Optical scanning mirror, semiconductor structure and manufacturing method thereof | Kiyohiko Kawano, Hiroshi Noge | 2012-04-24 |