Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10974220 | Fine particle producing apparatus and fine particle producing method | Hisao Nagai, Takafumi Okuma | 2021-04-13 |
| 10898957 | Production apparatus and production method for fine particles | Masaaki Tanabe, Hisao Nagai, Takafumi Okuma | 2021-01-26 |
| 10363540 | Production apparatus and production method for fine particles | Hisao Nagai, Takafumi Okuma | 2019-07-30 |
| 10252339 | Fine particle production apparatus and fine particle production method | Hisao Nagai, Daisuke Suetsugu, Takafumi Okuma | 2019-04-09 |
| 10124406 | Production apparatus and production method for fine particles | Hisao Nagai, Masaaki Tanabe, Takafumi Okuma | 2018-11-13 |
| 8349736 | Semiconductor device manufacturing method and semiconductor device | Isao Muragishi, Kai Takayuki, Saito Daishiro, Daisuke Yamamoto | 2013-01-08 |
| 8016982 | Sputtering apparatus and sputtering method | Masahiro Yamamoto, Isao Muragishi, Hitoshi Yamanishi | 2011-09-13 |
| 7814796 | Partial pressure measuring method and partial pressure measuring apparatus | Masahiro Yamamoto, Hitoshi Yamanishi, Isao Muragishi, Mitsuhiro Yoshinaga | 2010-10-19 |