Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10933438 | Coating apparatus with base material height changing device configured to selectively eject compressed gas | Motoi Hatanaka, Hiroshi Tanabe | 2021-03-02 |
| 10145022 | Crystal growth apparatus and crystal production method | Yusuke Mori, Mamoru Imade, Shinsuke Komatsu | 2018-12-04 |
| 9190301 | Wafer separating apparatus and wafer separating method | Kojiro Nakamura, Toru Furushige | 2015-11-17 |
| 8992726 | Method and device for peeling off silicon wafers | Koso Matsuno, Masayuki Takahashi, Tooru Furushige, Yuji Yamamoto | 2015-03-31 |