Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7044183 | Apparatus for processing substrates | Takayuki Suzuki, Masahiro Nakamura, Hideo Kobayashi | 2006-05-16 |
| 6982017 | Method for controlling deflection of substrates by temperature | Takayuki Suzuki, Masahiro Nakamura, Hideo Kobayashi | 2006-01-03 |