Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5606172 | Exposing apparatus and exposing method of works | Akira Morita, Takehiko Okamura | 1997-02-25 |
| 5258808 | Exposure apparatus for forming image | — | 1993-11-02 |
| 5185625 | Exposure apparatus for forming pattern on printed-wiring board | Chiaki Abe | 1993-02-09 |
| 5168302 | Apparatus for permeating irradiated light | — | 1992-12-01 |
| 5150253 | Reflective mirror having cooling unit attached thereto | — | 1992-09-22 |
| 5147130 | Cooling liquid recirculation system for light source unit | — | 1992-09-15 |
| 5119127 | Photoresist exposure method and apparatus therefor | — | 1992-06-02 |
| 5037722 | Photoresist exposure method and apparatus therefor | — | 1991-08-06 |
| 4973850 | Variable incident angle exposure apparatus | Motoyuki Tanaka | 1990-11-27 |