Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7969553 | Exposure device with mechanism for forming alignment marks and exposure process conducted by the same | Jin Sato | 2011-06-28 |
| 7119882 | Apparatus and method for projection exposure | Katsumi Momose, Shinichi Matsunaga | 2006-10-10 |