Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10727393 | Stack actuators array and deformable mirrors by utilizing wafer dicing, conductor refilling, and hybrid integrating and assembly techniques | — | 2020-07-28 |
| 8724200 | MEMS hierarchically-dimensioned optical mirrors and methods for manufacture thereof | — | 2014-05-13 |
| 8139280 | MEMS hierarchically-dimensioned deformable mirror | — | 2012-03-20 |
| 7116463 | High angular deflection micro-mirror system | Cardinal Warde | 2006-10-03 |
| 6822798 | Tunable optical filter | Cardinal Warde | 2004-11-23 |