Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10180316 | Method and device for the contactless assessment of the surface quality of a wafer | Boris Brodmann | 2019-01-15 |
| 4763006 | Device determining surface element inclination angle for the optical detection of form errors of a low order | Norbert Rau, Gerd Hübner, Wolfgang Staiger, Oskar Gerstorfer | 1988-08-09 |