Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8428448 | Walking beam type heat treatment apparatus | Takashi Iwata, Katsuhiro Kano | 2013-04-23 |
| 6656280 | Resist recycling apparatus and method for recycling the same | Yasuharu Oota | 2003-12-02 |
| 6503568 | Resist coating and recycling method | Yasuharu Oota | 2003-01-07 |
| 4724371 | Apparatus for detecting the degree of rotation of a rotational axis | Yasuo Ishiguro, Osamu Shiroshita | 1988-02-09 |