Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10147675 | Semiconductor device having through-electrode | — | 2018-12-04 |
| 9478481 | Semiconductor device, method for manufacturing same, and electronic component | — | 2016-10-25 |
| 9425138 | Semiconductor device having through-electrode | — | 2016-08-23 |
| 9324648 | Semiconductor device, method for manufacturing same, and electronic component | — | 2016-04-26 |
| 9257369 | Semiconductor device having a base film and manufacturing method for same | — | 2016-02-09 |
| 7485546 | Method of manufacturing semiconductor device | — | 2009-02-03 |
| 7176038 | Ferroelectric element and method for manufacturing the same | — | 2007-02-13 |
| 6979847 | Ferroelectric element and method for manufacturing the same | — | 2005-12-27 |
| 6440815 | Dielectric capacitor and its manufacturing method | — | 2002-08-27 |
| 6323454 | Apparatus employable for ashing | — | 2001-11-27 |
| 6199561 | Method for ashing | — | 2001-03-13 |
| 5902132 | Method of manufacturing a semiconductor device including a process of forming a contact hole | — | 1999-05-11 |