Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5480746 | Photomask and method of forming resist pattern using the same | Yoshio Yamashita | 1996-01-02 |
| 5324600 | Method of forming resist pattern and photomask therefor | Yoshiyuki Kawazu, Yoshio Yamashita | 1994-06-28 |
| 5316878 | Pattern forming method and photomasks used therefor | Tadashi Saito | 1994-05-31 |