Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8330950 | Method of manufacturing nitride semiconductor device including SiC substrate and apparatus for manufacturing nitride semiconductor device | — | 2012-12-11 |
| 7763910 | Semiconductor device and manufacturing method | Toshiharu Marui, Shinichi Hoshi | 2010-07-27 |
| 7384803 | Method of manufacturing nitride semiconductor device including SiC substrate and apparatus for manufacturing nitride semiconductor device | — | 2008-06-10 |