Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6120601 | Wafer orientation inspection system | Edward D. Schultheis | 2000-09-19 |
| 5742393 | Optical position calibration system | Edward D. Schultheis | 1998-04-21 |
| 5690744 | Wafer orientation alignment system | — | 1997-11-25 |
| 4857160 | High vacuum processing system and method | William E. Millikin Jr., Jerzy P. Puchacz, Manolito Reyes, Walter Schadler | 1989-08-15 |
| 4622122 | Planar magnetron cathode target assembly | — | 1986-11-11 |
| 4595452 | Method and apparatus for plasma etching | Henry A. Majewski | 1986-06-17 |
| 4592800 | Method of inhibiting corrosion after aluminum etching | Henry A. Majewski | 1986-06-03 |
| 4407708 | Method for operating a magnetron sputtering apparatus | — | 1983-10-04 |