Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8367215 | Radio-frequency microelectromechanical systems and method of manufacturing such systems | Jacob Marinus Jan Den Toonder, Auke R. Van Dijken, Theodoor G. S. M. Rijks | 2013-02-05 |
| 8058952 | MEMS resonator, a method of manufacturing thereof, and a MEMS oscillator | Bart Van Velzen | 2011-11-15 |
| 7847649 | MEMS resonator, a method of manufacturing thereof, and a MEMS oscillator | Hans-Peter Loebl, Frederik Vanhelmont | 2010-12-07 |